Precision ultrasound sensing on a chip
arXiv:1805.01940 · doi:10.1038/s41467-018-08038-4
Abstract
Ultrasound sensors have wide applications across science and technology. However, improved sensitivity is required for both miniaturisation and increased spatial resolution. Here, we introduce cavity optomechanical ultrasound sensing, where dual optical and mechanical resonances enhance the ultrasound signal. We achieve noise equivalent pressures of 8--300 Pa/ at kilohertz to megahertz frequencies in a microscale silicon-chip-based sensor with 120 dB dynamic range. The sensitivity far exceeds similar sensors that use optical resonance alone and, normalised to sensing area, surpasses previous air-coupled ultrasound sensors by several orders of magnitude. The noise floor is, for the first time, dominated by collisions from molecules in the gas within which the acoustic wave propagates. This new approach to acoustic sensing could find applications ranging from biomedical diagnostics, to autonomous navigation, trace gas sensing, and scientific exploration of the life-induced-vibrations of single cells.
arXiv comment50 pages, 15 figures
References in corpus (26)
- GW151226: Observation of Gravitational Waves from a 22-Solar-Mass Binary Black Hole Coalescence
- Laser cooling of a nanomechanical oscillator into its quantum ground state
- Sideband Cooling Micromechanical Motion to the Quantum Ground State
- Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
- Optomechanical Crystals
- Bidirectional and efficient conversion between microwave and optical light
- A microchip optomechanical accelerometer
- Quantum squeezing of motion in a mechanical resonator
- Resolved Sideband Cooling of a Micromechanical Oscillator
- Non-classical correlations between single photons and phonons from a mechanical oscillator
- Quantum acoustics with superconducting qubits
- A hybrid on-chip opto-nanomechanical transducer for ultra-sensitive force measurements
- Cavity Optomechanical Magnetometer
- Short-range force detection using optically-cooled levitated microspheres
- Cavity optomechanical transduction sensing of single molecules
- High frequency GaAs nano-optomechanical disk resonator
- High-sensitivity monitoring of micromechanical vibration using optical whispering gallery mode resonators
- Dissipative Optomechanics in a Michelson--Sagnac Interferometer
- Dissipative and Dispersive Optomechanics in a Nanocavity Torque Sensor
- Ultrasensitive optical magnetometry at the microscale
- Cooling and control of a cavity opto-electromechanical system
- Phonon number measurements using single photon opto-mechanics
- Critical optical coupling between a GaAs disk and a nanowaveguide suspended on the chip
- Magnetic Actuation and Feedback Cooling of a Cavity Optomechanical Torque Sensor
- Feedback Enhanced Sensitivity in Optomechanics: Surpassing the Parametric Instability Barrier
- An integrated quantum photonic sensor based on Hong-Ou-Mandel interference
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- Ultrasound sensing at thermomechanical limits with optomechanical buckled-dome microcavities
- Detecting Acoustic Blackbody Radiation with an Optomechanical Antenna
- Active-feedback quantum control of an integrated low-frequency mechanical resonator
- Detecting the effects of quantum gravity with exceptional points in optomechanical sensors
- Continuous optical-to-mechanical quantum state transfer in the unresolved sideband regime
- Fully reconfigurable optomechanical add-drop filters
- Observation of thermal acoustic modes of a droplet coupled to an optomechanical sensor
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