13 citations · 26 across the 5 of their papers we have counts for
5 papers
Large-scale defect accumulations in Czochralski-grown silicon
V. P. Kalinushkin, A. N. Buzynin, V. A. Yuryev +1
Czochralski-grown silicon crystals were studied by the techniques of the low-angle mid-IR-light scattering and electron-beam-induced current. The large-scale accumulations of elect…
Application of elastic mid-IR light scattering for inspection of internal gettering operations
O. V. Astafiev, A. N. Buzynin, V. P. Kalinushkin +1
Recently, the internal gettering process has become one of the main operations for manufacturing of semiconductor devices of CZ Si. However, methods for the direct inspection of th…
Absorption of Terahertz Radiation in Ge/Si(001) Heterostructures with Quantum Dots
E. S. Zhukova, B. P. Gorshunov, V. A. Yuryev +6
The terahertz spectra of the dynamic conductivity and radiation absorption coefficient in germanium-silicon heterostructures with arrays of Ge hut clusters (quantum dots) have been…
An initial phase of Ge hut array formation at low temperature on Si(001)
Larisa V. Arapkina, Vladimir A. Yuryev
We report a direct STM observation of Ge hut array nucleation on the Si(001) surface during ultrahigh vacuum molecular-beam epitaxy at 360C. Nuclei of pyramids and wedges have been…
Cathodoluminescence and Selective Emission of Er3+ in Oxides
V. M. Marchenko, M. G. Voitik, V. A. Yuryev
The dependence of the Er3+ cathodoluminescence and selective emission on the power of the YAG:Er3+ and Er2O3 excitation by an electron beam is spectroscopically studied for applica…