Comparison of Dielectric Loss in Titanium Nitride and Aluminum Superconducting Resonators

Abstract

Lossy dielectrics are a significant source of decoherence in superconducting quantum circuits. In this report, we model and compare the dielectric loss in bulk and interfacial dielectrics in titanium nitride (TiN) and aluminum (Al) superconducting coplanar waveguide (CPW) resonators. We fabricate isotropically trenched resonators to produce a series of device geometries that accentuate a specific dielectric region's contribution to resonator quality factor. While each dielectric region contributes significantly to loss in TiN devices, the metal-air interface dominates the loss in the Al devices. Furthermore, we evaluate the quality factor of each TiN resonator geometry with and without a post-process hydrofluoric (HF) etch, and find that it reduced losses from the substrate-air interface, thereby improving the quality factor.

References in corpus (5)

• Microwave Dielectric Loss at Single Photon Energies and milliKelvin Temperatures
• Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates
• A semi-empirical model for two-level system noise in superconducting microresonators
• Contribution of dielectrics to frequency and noise of NbTiN superconducting resonators
• Single crystal silicon capacitors with low microwave loss in the single photon regime

Cited by in corpus (30)

• Quantum information processing with bosonic qubits in circuit QED
• Investigation of microwave loss induced by oxide regrowth in high-Q Nb resonators
• High-coherence superconducting qubits made using industry-standard, advanced semiconductor manufacturing
• Error per single-qubit gate below $10^{-4}$ in a superconducting qubit
• Fano Interference in Microwave Resonator Measurements
• Path toward manufacturable superconducting qubits with relaxation times exceeding 0.1 ms
• Nitrogen Plasma Passivated Niobium Resonators for Superconducting Quantum Circuits
• Single-step implementation of a hybrid controlled-NOT gate with one superconducting qubit simultaneously controlling multiple target cat-state qubits
• Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators
• Magnetic field robust high quality factor NbTiN superconducting microwave resonators
• Manufacturing high-Q superconducting α-tantalum resonators on silicon wafers
• The Rise of Refractory Transition-Metal Nitride Films for Advanced Electronics and Plasmonics
• One-step implementation of a multi-target-qubit controlled-phase gate with photonic qubits encoded via eigenstates of the photon-number parity operator
• Argon milling induced decoherence mechanisms in superconducting quantum circuits
• Shape optimization of superconducting transmon qubit for low surface dielectric loss
• Acceptor-induced bulk dielectric loss in superconducting circuits on silicon
• Compact superconducting microwave resonators based on Al-AlOx-Al capacitor
• Characterization of process-related interfacial dielectric loss in aluminum-on-silicon by resonator microwave measurements, materials analysis, and imaging
• Engineering of Niobium Surfaces Through Accelerated Neutral Atom Beam Technology For Quantum Applications
• Simple realization of a hybrid controlled-controlled-Z gate with photonic control qubits encoded via eigenstates of the photon-number parity operator
• High resistance of superconducting TiN thin films against environmental attacks
• Material matters in superconducting qubits
• Dielectric Loss due to Charged-Defect Acoustic Phonon Emission
• Anomalous Loss Reduction Below Two-Level System Saturation in Aluminum Superconducting Resonators
• Disentangling superconductor and dielectric microwave losses in sub-micron $\mathrm{Nb}$/$\mathrm{TEOS}-\mathrm{Si}{\mathrm{O}}_2$ interconnects using a multi-mode microstrip resonator
• Quantum defects from single surface exhibit strong mutual interactions
• Quantum voting machine encoded with microwave photons
• Development of TiN/AlN-based superconducting qubit components
• Epitaxial titanium nitride microwave resonators: Structural, chemical, electrical, and microwave properties
• Surface Optimization of Superconducting Aluminum Resonators for Robust Quantum Device Fabrication