10 citations · 34 across the 8 of their papers we have counts for
9 papers
The Benefit of Wide Energy Range Spectrum Acquisition During Sputter Depth Profile Measurements
Uwe Scheithauer
Thin film systems are often analysed by using sputter depth profiling. First the sample gets eroded by inert gas ion impact during sputter depth profiling. Then the elemental compo…
Round Robin: Quantitative Lateral Resolution of PHI XPS microprobes Quantum 2000 / Quantera SXM
U. Scheithauer, M. Kolb, G. A. M. Kip +2
The quantitative lateral resolution is a reliable measure for the quality of an XPS microprobe equipped with a focused X-ray beam. It describes the long tail contributions of the X…
In-Situ Low-Angle Cross Sectioning: Bevel Slope Flattening due to Self-Alignment Effects
Uwe Scheithauer
Low-angle cross sections are produced inside an Auger microprobe using the equipped depth profile ion sputter gun. Simply the sample is partly covered by a mask. Utilizing the edge…
Long Time Stability of the Energy Scale Calibration of a Quantum 2000
Uwe Scheithauer
According to the international standard ISO 15472 the energy scale of an XPS instrument, type Physical Electronics Quantum 2000, was calibrated. It is shown, how the procedures of…
Reducing the Aspect Ratio of Contact Holes by In-Situ Low-Angle Cross Sectioning
Uwe Scheithauer
Auger analysis of high-aspect ratio contact holes of integrated microelectronic devices is a challenging analytical task. Due to geometrical shadowing the primary electron beam and…
Improved Sputter Depth Resolution in Auger Thin Film Analysis Using In Situ Low Angle Cross-Sections
Uwe Scheithauer
A none conventional approach for depth profiling of thin film systems with enhanced depth resolution has been developed using standard Auger microprobe instruments. For the prepara…