10 citations · 34 across the 10 of their papers we have counts for
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AES Analysis of Al Bond Pads in Electrically Insulating Surroundings Utilizing Metal Grid Contacting
Uwe Scheithauer
Bond pads are the electrical interconnections of a microelectronic device to the outside world. A polyimide layer (PI) on top of a microelectronic device protects the whole device…
Experimental setups for XPS measurements beyond the instrumental lateral resolution limit
Uwe Scheithauer
The lateral resolution of an X-ray photoelectron spectroscopy instrument, which is equipped with a focused X-ray beam, is limited by the nominal X-ray beam diameter and the long ta…
The Benefit of Wide Energy Range Spectrum Acquisition During Sputter Depth Profile Measurements
Uwe Scheithauer
Thin film systems are often analysed by using sputter depth profiling. First the sample gets eroded by inert gas ion impact during sputter depth profiling. Then the elemental compo…
Round Robin: Quantitative Lateral Resolution of PHI XPS microprobes Quantum 2000 / Quantera SXM
U. Scheithauer, M. Kolb, G. A. M. Kip +2
The quantitative lateral resolution is a reliable measure for the quality of an XPS microprobe equipped with a focused X-ray beam. It describes the long tail contributions of the X…
Long Time Stability of the Energy Scale Calibration of a Quantum 2000
Uwe Scheithauer
According to the international standard ISO 15472 the energy scale of an XPS instrument, type Physical Electronics Quantum 2000, was calibrated. It is shown, how the procedures of…