10 citations · 34 across the 8 of their papers we have counts for
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In-Situ Low-Angle Cross Sectioning: Bevel Slope Flattening due to Self-Alignment Effects
Uwe Scheithauer
Low-angle cross sections are produced inside an Auger microprobe using the equipped depth profile ion sputter gun. Simply the sample is partly covered by a mask. Utilizing the edge…
Reducing the Aspect Ratio of Contact Holes by In-Situ Low-Angle Cross Sectioning
Uwe Scheithauer
Auger analysis of high-aspect ratio contact holes of integrated microelectronic devices is a challenging analytical task. Due to geometrical shadowing the primary electron beam and…
Improved Sputter Depth Resolution in Auger Thin Film Analysis Using In Situ Low Angle Cross-Sections
Uwe Scheithauer
A none conventional approach for depth profiling of thin film systems with enhanced depth resolution has been developed using standard Auger microprobe instruments. For the prepara…
Examples for the improvements in AES Depth Profiling of Multilayer Thin Film Systems by Application of Factor Analysis Data Evaluation
Uwe Scheithauer
Factor Analysis has proved to be a powerful tool for the full exploitation of the chemical information included in the peak shapes and peak positions of spectra measured by AES dep…
Combined AES/Factor Analysis and RBS Investigation of a Thermally Treated Pt/Ti Metallisation on SiO2
U. Scheithauer, W. Hösler, R. Bruchhaus
Pt/Ti metallisation bilayers are used as bottom electrodes for ferroelectric thin films. During deposition of the ferroelectric films, these electrodes are exposed to elevated temp…
Application of the analytical methods REM/EDX, AES and SNMS to a chlorine induced aluminium corrosion
Uwe Scheithauer
Scanning electron microscopy - SEM - with energy dispersive X-ray detection - EDX -, Auger electron spectroscopy - AES - and sputtered neutral mass spectrometry - SNMS - have been…