10 citations · 44 across the 14 of their papers we have counts for
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physics.ins-det2017
The Benefit of Wide Energy Range Spectrum Acquisition During Sputter Depth Profile Measurements
Uwe Scheithauer
Thin film systems are often analysed by using sputter depth profiling. First the sample gets eroded by inert gas ion impact during sputter depth profiling. Then the elemental compo…
physics.ins-det2017★ 1 cited
Analysis of a Sputtered Si Surface for Ar Sputter Gas Supply Purity Monitoring
Uwe Scheithauer
For sputter depth profiling often sample erosion by Ar+ ions is used. Only a high purity of the sputter gas and a low contamination level of the ion gun avoids misleading depth pro…
physics.ins-det2017★ 3 cited
Vacuum Quality Monitoring of Analytical Sputter Depth Profile Equipment by Recontamination Measurements of a Sputtered Ti Surface
Uwe Scheithauer
Often a surface sensitive analytical technique in combination with sample erosion by inert ion sputtering is used for compositional in-depth analysis of solid state samples. Layer…