Photo-luminescence properties of ion implanted Er3+-defects in 4H-SiCOI towards integrated quantum photonics

Abstract

Colour centres hosted in solid-state materials such as silicon carbide and diamond are promising candidates for integration into chip-scale quantum systems. Specifically, the incorporation of these colour centres within photonic integrated circuits may enable precise control over their inherent photo-physical properties through strong light-matter interaction. Here, we investigate ion-implanted erbium (${\text{Er}}^{3+}$) defects embedded in thin-film 4H-silicon-carbide-on-insulator (4H-SiCOI). Optimized implantation conditions and thermal annealing processes designed to enhance the emission characteristics of the ${\text{Er}}^{3+}$-defect are reported. By examining key properties such as photoluminescence intensity, optical lifetime, and polarization, we present an analysis of ensemble ${\text{Er}}^{3+}$-defects within 4H-SiCOI, providing insights into their potential for future quantum applications.

9 pages, 5 figures

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Cited by in corpus (2)

• Integration of ${\text{Er}}^{3+}$-emitters in silicon-on-insulator nanodisks metasurface
• Narrow magneto-optical transitions in Erbium implanted silicon carbide-on-insulator