Hertz-linewidth semiconductor lasers using CMOS-ready ultra-high- microresonators
arXiv:2009.07390 · doi:10.1038/s41566-021-00761-7
Abstract
Driven by narrow-linewidth bench-top lasers, coherent optical systems spanning optical communications, metrology and sensing provide unrivalled performance. To transfer these capabilities from the laboratory to the real world, a key missing ingredient is a mass-produced integrated laser with superior coherence. Here, we bridge conventional semiconductor lasers and coherent optical systems using CMOS-foundry-fabricated microresonators with record high factor over 260 million and finesse over 42,000. Five orders-of-magnitude noise reduction in the pump laser is demonstrated, and for the first time, fundamental noise below 1 Hz Hz is achieved in an electrically-pumped integrated laser. Moreover, the same configuration is shown to relieve dispersion requirements for microcomb generation that have handicapped certain nonlinear platforms. The simultaneous realization of record-high factor, highly coherent lasers and frequency combs using foundry-based technologies paves the way for volume manufacturing of a wide range of coherent optical systems.
19 pages, 11 figures
References in corpus (7)
- Microresonator Soliton Dual-Comb Spectroscopy
- Monolithic Ultrahigh-Q Lithium Niobate Microring Resonator
- Frequency combs and platicons in optical microresonators with normal GVD
- Thermo-refractive noise in silicon nitride microresonators
- High-Q Si3N4 microresonators based on a subtractive processing for Kerr nonlinear optics
- Generation of a coherent near-infrared Kerr frequency comb in a monolithic microresonator with normal GVD
- Modulational instability and frequency combs in WGM microresonators with backscattering
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