A narrow-linewidth III-V/Si/Si3N4 laser using multilayer heterogeneous integration
arXiv:1911.06780 · doi:10.1364/OPTICA.384026
Abstract
Silicon nitride (Si3N4), as a complementary metal-oxide-semiconductor (CMOS) material, finds wide use in modern integrated circuit (IC) technology. The past decade has witnessed tremendous development of Si3N4 in photonic areas, with innovations in nonlinear photonics, optical sensing, etc. However, the lack of an integrated laser with high performance prohibits the large-scale integration of Si3N4 waveguides into complex photonic integrated circuits (PICs). Here, we demonstrate a novel III-V/Si/Si3N4 structure to enable efficient electrically pumped lasing in a Si3N4 based laser external cavity. The laser shows superior temperature stability and low phase noise compared with lasers purely dependent on semiconductors. Beyond this, the demonstrated multilayer heterogeneous integration provides a practical path to incorporate efficient optical gain with various low-refractive-index materials. Multilayer heterogeneous integration could extend the capabilities of semiconductor lasers to improve performance and enable a new class of devices such as integrated optical clocks and optical gyroscopes.
14 pages, 3 figures
Cited by in corpus (12)
- Hertz-linewidth semiconductor lasers using CMOS-ready ultra-high- microresonators
- High-yield wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits
- Laser soliton microcombs on silicon
- High-performance lasers for fully integrated silicon nitride photonics
- Magnetic-Free Silicon Nitride Integrated Optical Isolator
- Dissipative Kerr solitons in photonic molecules
- Efficient photo-induced second harmonic generation in silicon photonics
- Recent Advances in Laser Self-Injection Locking to High- Microresonators
- Towards high-power, high-coherence, integrated photonic mmWave platform with microcavity solitons
- On-chip optical parametric oscillation into the visible: generating red, orange, yellow, and green from a near-infrared pump
- Invited Review: Micro-fabricated components for cold atom sensors
- Piezoelectric actuation for integrated photonics