Ultrahigh Doping of Graphene Using Flame-Deposited MoO3

Abstract

The expected high performance of graphene-based electronics is often hindered by lack of adequate doping, which causes low carrier density and large sheet resistance. Many reported graphene doping schemes also suffer from instability or incompatibility with existing semiconductor processing. Here we report ultrahigh and stable p-type doping up to ~7x10^13 1/cm^2 (~2x10^21 1/cm^3}) of monolayer graphene grown by chemical vapor deposition. This is achieved by direct polycrystalline MoO3 growth on graphene using a rapid flame synthesis technique. With this approach, the metal-graphene contact resistance for holes is reduced to ~200 Ohm-um. We also demonstrate that flame-deposited MoO3 provides over 5x higher doping of graphene, as well as superior thermal and long-term stability, compared to electron-beam deposited MoO3.

arXiv comment4 pages, 3 figures

References in corpus (10)

• Electrochemically Top Gated Graphene: Monitoring Dopants by Raman Scattering
• Field-effect tunneling transistor based on vertical graphene heterostructures
• Controlling electron-phonon interactions in graphene at ultra high carrier densities
• Carrier scattering, mobilities and electrostatic potential in mono-, bi- and tri-layer graphenes
• Mobility and Saturation Velocity in Graphene on SiO2
• Resistive Graphene Humidity Sensors with Rapid and Direct Electrical Readout
• Effect of high-K dielectrics on charge transport in graphene
• Variability Effects in Graphene: Challenges and Opportunities for Device Engineering and Applications
• Going Ballistic: Graphene Hot Electron Transistors
• Lithium-ion-based solid electrolyte tuning of the carrier density in graphene

Cited by in corpus (6)

• High Current Density in Monolayer MoS${}_2$ Doped by AlO${}_x$
• High-Specific-Power Flexible Transition Metal Dichalcogenide Solar Cells
• High performance integrated graphene electro-optic modulator at cryogenic temperature
• Surface conduction and reduced electrical resistivity in ultrathin noncrystalline NbP semimetal
• Quasiperiodic pairing in graphene quasicrystals
• Charge-Transfer Hyperbolic Polaritons in $\alpha$-MoO${}_3$/graphene heterostructures