First demonstration of 200, 100, and 50 um pitch Resistive AC-Coupled Silicon Detectors (RSD) with 100% fill-factor for 4D particle tracking

Abstract

We designed, produced, and tested RSD (Resistive AC-Coupled Silicon Detectors) devices, an evolution of the standard LGAD (Low-Gain Avalanche Diode) technology where a resistive n-type implant and a coupling dielectric layer have been implemented. The first feature works as a resistive sheet, freezing the multiplied charges, while the second one acts as a capacitive coupling for readout pads. We succeeded in the challenging goal of obtaining very fine pitch (50, 100, and 200 um) while maintaining the signal waveforms suitable for high timing and 4D-tracking performances, as in the standard LGAD-based devices.

References in corpus (4)

• Beam test results of a 16 ps timing system based on ultra-fast silicon detectors
• Radiation resistant LGAD design
• Fabrication and performance of AC-coupled LGADs
• Development of a technology for the fabrication of Low-Gain Avalanche Detectors at BNL

Cited by in corpus (16)

• Resistive AC-Coupled Silicon Detectors: principles of operation and first results from a combined analysis of beam test and laser data
• Silicon Sensors for Future Particle Trackers
• Measurements of an AC-LGAD strip sensor with a 120 GeV proton beam
• 4D Tracking: Present Status and Perspective
• First application of machine learning algorithms to the position reconstruction in Resistive Silicon Detectors
• The second production of RSD (AC-LGAD) at FBK
• First survey of centimeter-scale AC-LGAD strip sensors with a 120 GeV proton beam
• The performance of large-pitch AC-LGAD with different N+ dose
• Results for pixel and strip centimeter-scale AC-LGAD sensors with a 120 GeV proton beam
• First experimental results of the spatial resolution of RSD pad arrays read out with a 16-ch board
• High performance picosecond- and micron-level 4D particle tracking with 100% fill-factor Resistive AC-Coupled Silicon Detectors (RSD)
• First Test Results of the Trans-Impedance Amplifier Stage of the Ultra-fast HPSoC ASIC
• Silicon sensors with resistive read-out: Machine Learning techniques for ultimate spatial resolution
• AC-LGADs Fermilab Front-End Electronics Characterization
• Studying AC-LGAD strip sensors from laser and testbeam measurements
• Characterization of BNL and HPK AC-LGAD sensors with a 120 GeV proton beam