Mass measurement of graphene using quartz crystal microbalances
arXiv:1902.11098 · doi:10.1063/1.5111086
Abstract
Current wafer-scale fabrication methods for graphene-based electronics and sensors involve the transfer of single-layer graphene by a support polymer. This often leaves some polymer residue on the graphene, which can strongly impact its electronic, thermal, and mechanical resonance properties. To assess the cleanliness of graphene fabrication methods, it is thus of considerable interest to quantify the amount of contamination on top of the graphene. Here, we present a methodology for direct measurement of the mass of the graphene sheet using quartz crystal microbalances (QCM). By monitoring the QCM resonance frequency during removal of graphene in an oxygen plasma, the total mass of the graphene and contamination is determined with sub-graphene-monolayer accuracy. Since the etch-rate of the contamination is higher than that of graphene, quantitative measurements of the mass of contaminants below, on top, and between graphene layers are obtained. We find that polymer-based dry transfer methods can increase the mass of a graphene sheet by a factor of 10. The presented mass measurement method is conceptually straightforward to interpret and can be used for standardized testing of graphene transfer procedures in order to improve the quality of graphene devices in future applications.
References in corpus (25)
- The electronic properties of graphene
- The Raman Fingerprint of Graphene
- Impermeable Atomic Membranes from Graphene Sheets
- Making graphene visible
- Thermal properties of graphene: Fundamentals and applications
- Wafer-scale synthesis and transfer of graphene films
- A Graphene Field-Effect Device
- Performance of Monolayer Graphene Nanomechanical Resonators with Electrical Readout
- Current-induced cleaning of graphene
- Anomalies in thickness measurements of graphene and few layer graphite crystals by tapping mode atomic force microscopy
- Estimation of Young's Modulus of Graphene by Raman Spectroscopy
- Graphene mechanical oscillators with tunable frequency
- The Effect of Intrinsic Crumpling on the Mechanics of Free-Standing Graphene
- Probing thermal expansion of graphene and modal dispersion at low-temperature using graphene NEMS resonators
- Graphene Squeeze-Film Pressure Sensors
- Mechanical cleaning of graphene
- Graphene Transfer with Reduced Residue
- Ultra-sensitive Hall sensors based on graphene encapsulated in hexagonal boron nitride
- Stamp transferred suspended graphene mechanical resonators for radio-frequency electrical readout
- Young's modulus of 2D materials extracted from their nonlinear dynamic response
- Hidden area and mechanical nonlinearities in freestanding graphene
- Optomechanics for thermal characterization of suspended graphene
- Graphene Gas Osmometers
- Graphene mechanical pixels for Interferometric MOdulator Displays (GIMOD)
- Weighting graphene with QCM to monitor interfacial mass changes