Stress control of tensile-strained In${}_{1-x}$Ga${}_x$P nanomechanical string resonators

Abstract

We investigate the mechanical properties of freely suspended nanostrings fabricated from tensile-stressed, crystalline In${}_{1-x}$Ga${}_x$P. The intrinsic strain is a consequence of the epitaxial growth given by the lattice mismatch between the thin film and the substrate which is confirmed by x-ray diffraction measurements. The flexural eigenfrequencies of the nanomechanical string resonators reveal an orientation dependent stress with a maximum value of 650 MPa. The angular dependence is explained by a combination of anisotropic Young's modulus and a change of elastic properties caused by defects. As a function of the crystal orientation a stress variation of up to 50 % is observed. This enables fine tuning of the tensile stress for any given Ga content $x$, which implies interesting prospects for the study of high Q nanomechanical systems.

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