Via Method for Lithography Free Contact and Preservation of 2D Materials

Abstract

Atomically thin 2D materials span the common components of electronic circuits as metals, semi-conductors, and insulators, and can manifest correlated phases such as superconductivity, charge density waves, and magnetism. An ongoing challenge in the field is to incorporate these 2D materials into multi-layer hetero-structures with robust electrical contacts while preventing disorder and degradation. In particular, preserving and studying air-sensitive 2D materials has presented a significant challenge since they readily oxidize under atmospheric conditions. We report a new technique for contacting 2D materials, in which metal via contacts are integrated into flakes of insulating hexagonal boron nitride, and then placed onto the desired conducting 2D layer, avoiding direct lithographic patterning onto the 2D conductor. The metal contacts are planar with the bottom surface of the boron nitride and form robust contacts to multiple 2D materials. These structures protect air-sensitive 2D materials for months with no degradation in performance. This via contact technique will provide the capability to produce atomic printed circuit boards that can form the basis of more complex multi-layer heterostructures.

arXiv comment16 pages, 4 figures

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• Strongly adhesive dry transfer technique for van der Waals heterostructure
• Using nonlocal surface transport to identify the axion insulator
• Contact resistance and interfacial engineering: Advances in high-performance 2D-TMD based devices
• Doping-induced superconductivity in the van der Waals superatomic crystal Re${}_6$Se${}_8$Cl${}_2$
• Absence of dissipationless transport in clean 2D superconductors
• Superconducting contacts to a monolayer semiconductor
• 2D high temperature superconductor integration in contact printed circuit boards
• Clean BN encapsulated 2D FETs with lithography compatible contacts
• Signature of spin-resolved quantum point contact in p-type trilayer WSe${}_2$ van der Waals heterostructure
• Enhanced Superconductivity in Monolayer $T_d$-MoTe${}_2$ with Tilted Ising Spin Texture
• Tunneling Spectroscopy of Two-Dimensional Materials Based on Via Contacts
• Direct-Write Printed Contacts to Layered and 2D Materials
• Atomically-precise synthesis and simultaneous integration of 2D transition metal dichalcogenides enabled by nano-confinement
• Semimetal-Monolayer Transition Metal Dichalcogenides Photodetectors for Wafer-Scale Ultraviolet Photonics
• Hall-effect in the MnBi_2Te_4 crystal using silicon nitride nanomembrane via contacts
• Blockade of vortex flow by thermal fluctuations in atomically thin clean-limit superconductors
• Contact transparency in mechanically assembled 2D material devices
• Scratching lithography, manipulation, and soldering of 2D materials using microneedle probes
• Density-dependent spin susceptibility and effective mass in monolayer MoSe2
• Impact of the angular alignment on the crystal field and intrinsic doping of bilayer graphene/BN heterostructures
• Making high-quality quantum microwave devices with van der Waals superconductors
• Building 3D superconductor-based Josephson junctions using a via transfer approach
• Pre-Patterned Superconducting Contacts for Clean Superconductor-Topological Material Interfaces Enabling Long-Range Josephson Coupling