Encapsulated silicon nitride nanobeam cavity for nanophotonics using layered materials
arXiv:1709.02032 · doi:10.1021/acsphotonics.8b00036
Abstract
Most existing implementations of silicon nitride photonic crystal cavities rely on suspended membranes due to the low refractive index of silicon nitride. Such floating membranes are not mechanically robust, making them suboptimal for developing a hybrid optoelectronic platform where new materials, such as layered 2D materials, are transferred on a pre-existing optical cavity. To address this issue, we propose a silicon nitride nanobeam resonator design where the silicon nitride membrane is encapsulated by material with a refractive index of ~1.5, such as silicon dioxide or PMMA. The theoretically calculated quality factor of the cavities can be as large as 100,000 , with a mode-volume of 2.5 times the cubic wavelength. We fabricated the cavity, and measured the transmission spectrum with highest quality factor of 7000. We also successfully transferred monolayer tungsten diselenide on the encapsulated silicon nitride nanobeam, and demonstrated coupling of the cavity with the monolayer exciton and the defect emissions.
References in corpus (7)
- Two-Dimensional Material Nanophotonics
- Measurement of the optical dielectric function of transition metal dichalcogenide monolayers: MoS2, MoSe2, WS2 and WSe2
- Large-scale quantum-emitter arrays in atomically thin semiconductors
- Deterministic strain-induced arrays of quantum emitters in a two-dimensional semiconductor
- Fast pick up technique for high quality heterostructures of bilayer graphene and hexagonal boron nitride
- Atomically thin quantum light emitting diodes
- Room-temperature Continuous-wave Lasing from Monolayer Molybdenum Ditelluride with a Silicon Nanobeam Cavity
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- Active tuning of hybridized modes in a heterogeneous photonic molecule
- Full Polarization Control of Photons with Evanescent Wave Coupling in the Ultra Subwavelength Gap of Photonic Molecules
- Free-standing silicon nitride nanobeams with efficient fiber-chip interface for cavity QED
- Optimal condition to probe strong coupling of two-dimensional excitons and zero-dimensional cavity modes