Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits

Abstract

Many superconducting qubits are highly sensitive to dielectric loss, making the fabrication of coherent quantum circuits challenging. To elucidate this issue, we characterize the interfaces and surfaces of superconducting coplanar waveguide resonators and study the associated microwave loss. We show that contamination induced by traditional qubit lift-off processing is particularly detrimental to quality factors without proper substrate cleaning, while roughness plays at most a small role. Aggressive surface treatment is shown to damage the crystalline substrate and degrade resonator quality. We also introduce methods to characterize and remove ultra-thin resist residue, providing a way to quantify and minimize remnant sources of loss on device surfaces.

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• Investigating surface loss effects in superconducting transmon qubits
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• Decoherence spectroscopy with individual two-level tunneling defects
• Bulk and surface loss in superconducting transmon qubits
• Disentangling Losses in Tantalum Superconducting Circuits
• Microwave Package Design for Superconducting Quantum Processors
• Substrate surface engineering for high-quality silicon/aluminum superconducting resonators
• Loss mechanisms in superconducting thin film microwave resonators
• Low Loss Multi-Layer Wiring for Superconducting Microwave Devices
• Superconducting Quantum Simulator for Topological Order and the Toric Code
• Path toward manufacturable superconducting qubits with relaxation times exceeding 0.1 ms
• Precision measurement of the microwave dielectric loss of sapphire in the quantum regime with parts-per-billion sensitivity
• Extending the Quantum Coherence of a Near-Surface Qubit by Coherently Driving the Paramagnetic Surface Environment
• Noise and loss of superconducting aluminium resonators at single photon energies
• Flux-driven Josephson parametric amplifiers: Hysteretic flux response and nondegenerate gain measurements
• Optimization of infrared and magnetic shielding of superconducting TiN and Al coplanar microwave resonators
• Multiplexed Readout of Transmon Qubits with Josephson Bifurcation Amplifiers
• Planar multilayer circuit quantum electrodynamics
• Probing defect densities at the edges and inside Josephson junctions of superconducting qubits
• Quantum Sensors for Microscopic Tunneling Systems
• Low-Loss Superconducting Nanowire Circuits Using a Neon Focused Ion Beam
• In-situ bandaged Josephson junctions for superconducting quantum processors
• Superconducting qubits on silicon substrates for quantum device integration
• Coherent superconducting qubits from a subtractive junction fabrication process
• Dielectric loss extraction for superconducting microwave resonators
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• Probing a two-level system bath via the frequency shift of an off-resonantly-driven cavity
• Free-standing silicon shadow masks for transmon qubit fabrication
• Effects of surface treatments on flux tunable transmon qubits
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• Superconducting coplanar microwave resonators with operating frequencies up to 50 GHz
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• Argon milling induced decoherence mechanisms in superconducting quantum circuits
• A frequency and sensitivity tunable microresonator array for high-speed quantum processor readout
• Nonlinear quantum Langevin equations for bosonic modes in solid-state systems
• Analytical modeling of participation reduction in superconducting coplanar resonator and qubit designs through substrate trenching
• Designing arbitrary single-axis rotations robust against perpendicular time-dependent noise
• Shortcuts to adiabaticity in superconducting circuits for fast multi-partite state generation
• Enhanced Superconducting Qubit Performance Through Ammonium Fluoride Etch
• Material matters in superconducting qubits
• Power and temperature dependent model for High Q superconductors
• Niobium Air Bridges as Low-Loss Components for Superconducting Quantum Hardware
• Characterization of the Chemical and Electrical Properties of Defects at the Niobium-Silicon Interface
• Making high-quality quantum microwave devices with van der Waals superconductors
• Fabrication effects on Niobium oxidation and surface contamination in Niobium-metal bilayers using X-ray photoelectron spectroscopy
• Surface Optimization of Superconducting Aluminum Resonators for Robust Quantum Device Fabrication
• Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes
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