Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits

Abstract

Many superconducting qubits are highly sensitive to dielectric loss, making the fabrication of coherent quantum circuits challenging. To elucidate this issue, we characterize the interfaces and surfaces of superconducting coplanar waveguide resonators and study the associated microwave loss. We show that contamination induced by traditional qubit lift-off processing is particularly detrimental to quality factors without proper substrate cleaning, while roughness plays at most a small role. Aggressive surface treatment is shown to damage the crystalline substrate and degrade resonator quality. We also introduce methods to characterize and remove ultra-thin resist residue, providing a way to quantify and minimize remnant sources of loss on device surfaces.

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Cited by in corpus (15)

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• Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits
• Moving beyond the transmon: Noise-protected superconducting quantum circuits
• Circuit Quantum Electrodynamics Architecture for Gate-Defined Quantum Dots in Silicon
• Simplified Josephson-junction fabrication process for reproducibly high-performance superconducting qubits
• Microwave Package Design for Superconducting Quantum Processors
• Optimization of infrared and magnetic shielding of superconducting TiN and Al coplanar microwave resonators
• Multiplexed Readout of Transmon Qubits with Josephson Bifurcation Amplifiers
• Quantum Sensors for Microscopic Tunneling Systems
• Low-Loss Superconducting Nanowire Circuits Using a Neon Focused Ion Beam
• Coherent superconducting qubits from a subtractive junction fabrication process
• Nonlinear quantum Langevin equations for bosonic modes in solid-state systems
• Material matters in superconducting qubits
• Characterization of the Chemical and Electrical Properties of Defects at the Niobium-Silicon Interface