activity
20172022
most citedScaled indium oxide transistors fabricated using atomic layer deposition

304 citations · 926 across the 8 of their papers we have counts for

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5 papers · 1 filter

cond-mat.mtrl-sci2022304 cited

Scaled indium oxide transistors fabricated using atomic layer deposition

Mengwei Si, Zehao Lin, Zhizhong Chen +3

In order to continue to improve integrated circuit performance and functionality, scaled transistors with short channel lengths and low thickness are needed. But the further scalin…

cond-mat.mtrl-sci2020223 cited

Why In2O3 Can Make 0.7 nm Atomic Layer Thin Transistors?

Mengwei Si, Yaoqiao Hu, Zehao Lin +7

In this work, we demonstrate enhancement-mode field-effect transistors by atomic-layer-deposited (ALD) amorphous In2O3 channel with thickness down to 0.7 nm. Thickness is found to…

cond-mat.mtrl-sci202083 cited

Scaled Atomic-Layer-Deposited Indium Oxide Nanometer Transistors with Maximum Drain Current Exceeding 2 A/mm at Drain Voltage of 0.7 V

Mengwei Si, Zehao Lin, Adam Charnas +1

In this work, we demonstrate scaled back-end-of-line (BEOL) compatible indium oxide (In2O3) transistors by atomic layer deposition (ALD) with channel thickness (Tch) of 1.0-1.5 nm,…

cond-mat.mtrl-sci2019

Room Temperature Electrocaloric Effect in Layered Ferroelectric CuInP2S6 for Solid State Refrigeration

Mengwei Si, Atanu K. Saha, Pai-Ying Liao +10

A material with reversible temperature change capability under an external electric field, known as the electrocaloric effect (ECE), has long been considered as a promising solid-s…

cond-mat.mtrl-sci201752 cited

-GaO Nano-membrane Negative Capacitance Field-effect Transistor with Steep Subthreshold Slope for Wide Bandgap Logic Applications

Mengwei Si, Lingming Yang, Hong Zhou +1

Steep-slope -GaO nano-membrane negative capacitance field-effect transistors (NC-FETs) are demonstrated with ferroelectric hafnium zirconium oxide in gate dielectric sta…