13 citations · 40 across the 7 of their papers we have counts for
7 papers
Extended defects as a source of phonon confinement in polycrystalline Si and Ge films
Larisa V. Arapkina, Kirill V. Chizh, Oleg V. Uvarov +9
We present Raman spectroscopy of the polycrystalline Si and Ge films deposited by molecular beam deposition on a dielectric substrate. The Raman study has been made using lasers wi…
Evolution of Ge wetting layers growing on smooth and rough Si (001) surfaces: isolated {105} facets as a kinetic factor of stress relaxation
Larisa V. Arapkina, Kirill V. Chizh, Vladimir P. Dubkov +2
The results of STM and RHEED studies of a thin Ge film grown on the Si/Si(001) epitaxial layers with different surface relief are presented. Process of the partial stress relaxatio…
Influence of the thickness of Si and Ge films deposited on SiN/SiO/Si substrates on their structure and diffusion of hydrogen atoms from SiN layers
Larisa V. Arapkina, Kirill V. Chizh, Dmitry B. Stavrovskii +5
The results of RHEED, FTIR and Raman spectroscopy study of silicon and germanium films with the thickness up to 200 nm grown from molecular beams on dielectric SiN/SiO/…
Diffusion processes in germanium and silicon films grown on SiN substrates
Larisa V. Arapkina, Kirill V. Chizh, Dmitry B. Stavrovskii +3
In this article, the results of investigation of processes occurring during the molecular-beam deposition of germanium layers on SiN dielectric substrates within a wide ran…
Low-temperature formation of platinum silicides on polycrystalline silicon
Kirill V. Chizh, Vladimir P. Dubkov, Vyacheslav M. Senkov +5
Phase formation and transitions in platinum silicide films on polycrystalline Si in the process of Pt magnetron sputtering and heat treatments at different temperatures are studied…
Room-temperature formation of PtSi/PtSi films on poly-Si substrates
V. P. Dubkov, S. A. Mironov, K. V. Chizh +1
We propose a way of formation of thin bilayer PtSi/PtSi films at room temperature on poly-Si substrates by Pt magnetron sputtering and wet etching, obtain such film, invest…