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Diffusion processes in germanium and silicon films grown on SiN substrates
Larisa V. Arapkina, Kirill V. Chizh, Dmitry B. Stavrovskii +3
In this article, the results of investigation of processes occurring during the molecular-beam deposition of germanium layers on SiN dielectric substrates within a wide ran…
Low-temperature formation of platinum silicides on polycrystalline silicon
Kirill V. Chizh, Vladimir P. Dubkov, Vyacheslav M. Senkov +5
Phase formation and transitions in platinum silicide films on polycrystalline Si in the process of Pt magnetron sputtering and heat treatments at different temperatures are studied…
Pt silicide/poly-Si Schottky diodes as temperature sensors for bolometers
V. A. Yuryev, K. V. Chizh, V. A. Chapnin +8
Platinum silicide Schottky diodes formed on films of polycrystalline Si doped by phosphorus are demonstrated to be efficient and manufacturable CMOS-compatible temperature sensors…