27 citations · 41 across the 2 of their papers we have counts for
3 papers
Progress toward superconductor electronics fabrication process with planarized NbN and NbN/Nb layers
Sergey K. Tolpygo, Justin L. Mallek, Vladimir Bolkhovsky +5
To increase density of superconductor digital and neuromorphic circuits by 10x and reach integration scale of Josephson junctions (JJs) per chip, we developed a new fabricat…
Wafer-Scale Characterization of a Superconductor Integrated Circuit Fabrication Process, Using a Cryogenic Wafer Prober
Joshua T. West, Arthur Kurlej, Alex Wynn +3
Using a fully automated cryogenic wafer prober, we measured superconductor fabrication process control monitors and simple integrated circuits on 200 mm wafers at 4.4 K, including…
Properties of Unshunted and Resistively Shunted Nb/AlOx-Al/Nb Josephson Junctions With Critical Current Densities from 0.1 mA/μm^2 to 1 mA/μm^2
Sergey K. Tolpygo, Vladimir Bolkhovsky, Scott Zarr +5
We investigated current-voltage characteristics of unshunted and externally shunted Josephson junctions (JJs) with high critical current densities, Jc, in order to extract their ba…