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20122023
most citedAdvanced Fabrication Processes for Superconducting Very Large Scale Integrated Circuits

253 citations · 628 across the 7 of their papers we have counts for

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cond-mat.supr-con2023★ 27 cited

Progress toward superconductor electronics fabrication process with planarized NbN and NbN/Nb layers

Sergey K. Tolpygo, Justin L. Mallek, Vladimir Bolkhovsky +5

To increase density of superconductor digital and neuromorphic circuits by 10x and reach integration scale of Josephson junctions (JJs) per chip, we developed a new fabricat…