52 citations · 293 across the 16 of their papers we have counts for
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physics.plasm-ph2018★ 44 cited
Plasma density and ion energy control via driving frequency and applied voltage in a low pressure capacitively coupled plasma discharge
Sarveshwar Sharma, Abhijit Sen, N. Sirse +2
The dynamical characteristics of a single frequency low pressure capacitively coupled plasma (CCP) device under varying applied RF voltages and driving frequencies are studied usin…
physics.plasm-ph2018★ 52 cited
Influence of driving frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge
S. Sharma, N. Sirse, M. M. Turner +1
One-dimensional particle-in-cell simulation is used to simulate the capacitively coupled argon plasma for a range of driving frequency from 13.56 MHz to 100 MHz. The argon chemistr…