activity
20182026
most citedInfluence of driving frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge

52 citations · 293 across the 16 of their papers we have counts for

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physics.plasm-ph2025

Multiphysics Simulation and First Prototype Development of a Microwave Plasma System for Chemical Vapour Deposition (CVD) Applications

Akash Akash, Sanjeev Kumar Pandey, Venkata Sai Teja Madana +9

With the aid of COMSOL multiphysics simulations, a compact microwave plasma reactor operated at 2.45 GHz frequency has been designed for diamond film deposition. The reactor consis…