38 citations · 38 across the 1 of their papers we have counts for
6 papers
High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform
Sarveshwar Sharma, Nishant Sirse, Miles M Turner
A particle-in-cell (PIC) simulation study is performed to investigate the discharge asymmetry, higher harmonic generations and electron heating mechanism in a low pressure very hig…
Driving frequency effect on discharge parameters and higher harmonic generation in capacitive discharges at constant power densities
Sarveshwar Sharma, Nishant Sirse, Animesh Kuley +2
Very high frequency (VHF) driven capacitive discharges are now being increasingly adopted for plasma-based materials processing due to their high processing rates and lower substra…
Electric field non-linearity in very high frequency capacitive discharges at constant electron plasma frequency
Sarveshwar Sharma, Nishant Sirse, Animesh Kuley +1
A self-consistent particle-in-cell simulation study is performed to investigate the effect of driving frequency on the electric field non-linearity, electron heating mechanism and…
Electric field filamentation and higher harmonic generation in a very high frequency capacitive discharges
Sarveshwar Sharma, N. Sirse, A. Sen +2
The effects of the discharge voltage on the formation and nature of electric field transients in a symmetric, collisionless, very high frequency, capacitively coupled plasma are st…
Plasma density and ion energy control via driving frequency and applied voltage in a low pressure capacitively coupled plasma discharge
Sarveshwar Sharma, Abhijit Sen, N. Sirse +2
The dynamical characteristics of a single frequency low pressure capacitively coupled plasma (CCP) device under varying applied RF voltages and driving frequencies are studied usin…
Influence of driving frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge
S. Sharma, N. Sirse, M. M. Turner +1
One-dimensional particle-in-cell simulation is used to simulate the capacitively coupled argon plasma for a range of driving frequency from 13.56 MHz to 100 MHz. The argon chemistr…