activity
20182026
most citedInfluence of driving frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge

52 citations · 293 across the 16 of their papers we have counts for

collaborators

16 papers

physics.plasm-ph2026

Effect of static magnetic island on ITG of ADITYA-U tokamak

Vibhor Kumar Singh, Amal R Biju, Jaya Kumar Alageshan +10

Magnetic islands play a crucial role in regulating plasma confinement in tokamaks by interacting with micro-instabilities, such as the ion temperature gradient (ITG) mode. This wor…

physics.plasm-ph2025

Multiphysics Simulation and First Prototype Development of a Microwave Plasma System for Chemical Vapour Deposition (CVD) Applications

Akash Akash, Sanjeev Kumar Pandey, Venkata Sai Teja Madana +9

With the aid of COMSOL multiphysics simulations, a compact microwave plasma reactor operated at 2.45 GHz frequency has been designed for diamond film deposition. The reactor consis…

physics.plasm-ph2024

Effect of gas pressure on plasma asymmetry and higher harmonics generation in sawtooth waveform driven capacitively coupled plasma discharge

Sarveshwar Sharma, Miles Turner, Nishant Sirse

Using particle-in-cell (PIC) simulation technique, the effect of gas pressure (5-500 mTorr) on the plasma spatial asymmetry, ionization rate, metastable gas densities profile, elec…

physics.plasm-ph2024

Sheath effects with thermal electrons on the resonance frequency of a DC-biased hairpin probe

Pawandeep Singh, Avnish Pandey, Swati Dahiya +3

The dielectric constant of a sheath, whether ionic or electronic, formed around the cylindrical limbs of a hairpin probe, is often considered the same as that of a vacuum. However,…

physics.plasm-ph2024★ 1 cited

Experimental investigation of an electronegative cylindrical capacitively coupled geometrically asymmetric plasma discharge with an axisymmetric magnetic field

Swati Dahiya, Narayan Sharma, Shivani Geete +3

In this study, we have investigated the production of negative ions by mixing electronegative oxygen gas with electropositive argon gas in a geometrically asymmetric cylindrical ca…

physics.plasm-ph2023

A systematic investigation of electric field nonlinearity and field reversal in low pressure capacitive discharges driven by sawtooth-like waveforms

Sarveshwar Sharma, Nishant Sirse, Miles M Turner +1

Understanding electron and ion heating phenomenon in capacitively coupled radio-frequency plasma discharges is vital for many plasma processing applications. In this article, using…

physics.plasm-ph2023★ 9 cited

Discharge characteristics of a low-pressure geometrically asymmetric cylindrical capacitively coupled plasma with an axisymmetric magnetic field

Swati Dahiya, Pawandeep Singh, Yashashri Patil +3

We investigate the discharge characteristics of a low-pressure geometrically asymmetric cylindrical capacitively coupled plasma discharge with an axisymmetric magnetic field genera…

physics.plasm-ph2023★ 11 cited

Flux and energy asymmetry in a low pressure capacitively coupled plasma discharge excited by sawtooth-like waveform -- a harmonic study

Sarveshwar Sharma, Nishant Sirse, Miles M Turner

Control over plasma asymmetry in a low-pressure capacitively coupled plasma (CCP) discharges is vital for many plasma processing applications. In this article, using the particle-i…

physics.plasm-ph2021★ 30 cited

Plasma asymmetry, electron and ion energy distribution function in capacitive discharges excited by tailored waveforms

Sarveshwar Sharma, Nishant Sirse, Animesh Kuley +1

Using particle-in-cell simulation technique, we investigate the plasma and ionization asymmetry, electron and ion energy distribution function in capacitive discharges excited by t…

physics.plasm-ph2021★ 23 cited

Ion energy distribution function in very high frequency capacitive discharges excited by sawtooth waveform

Sarveshwar Sharma, Nishant Sirse, Animesh Kuley +1

Tailoring ion energy distribution function (IEDF) is vital for advanced plasma processing applications. Capacitively coupled plasma (CCP) discharges excited using non-sinusoidal wa…

physics.plasm-ph2020★ 25 cited

High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform

Sarveshwar Sharma, Nishant Sirse, Miles M Turner

A particle-in-cell (PIC) simulation study is performed to investigate the discharge asymmetry, higher harmonic generations and electron heating mechanism in a low pressure very hig…

physics.plasm-ph2020★ 29 cited

Driving frequency effect on discharge parameters and higher harmonic generation in capacitive discharges at constant power densities

Sarveshwar Sharma, Nishant Sirse, Animesh Kuley +2

Very high frequency (VHF) driven capacitive discharges are now being increasingly adopted for plasma-based materials processing due to their high processing rates and lower substra…

physics.plasm-ph2019★ 31 cited

Electric field non-linearity in very high frequency capacitive discharges at constant electron plasma frequency

Sarveshwar Sharma, Nishant Sirse, Animesh Kuley +1

A self-consistent particle-in-cell simulation study is performed to investigate the effect of driving frequency on the electric field non-linearity, electron heating mechanism and…

physics.plasm-ph2019★ 38 cited

Electric field filamentation and higher harmonic generation in a very high frequency capacitive discharges

Sarveshwar Sharma, N. Sirse, A. Sen +2

The effects of the discharge voltage on the formation and nature of electric field transients in a symmetric, collisionless, very high frequency, capacitively coupled plasma are st…

physics.plasm-ph2018★ 44 cited

Plasma density and ion energy control via driving frequency and applied voltage in a low pressure capacitively coupled plasma discharge

Sarveshwar Sharma, Abhijit Sen, N. Sirse +2

The dynamical characteristics of a single frequency low pressure capacitively coupled plasma (CCP) device under varying applied RF voltages and driving frequencies are studied usin…

physics.plasm-ph2018★ 52 cited

Influence of driving frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge

S. Sharma, N. Sirse, M. M. Turner +1

One-dimensional particle-in-cell simulation is used to simulate the capacitively coupled argon plasma for a range of driving frequency from 13.56 MHz to 100 MHz. The argon chemistr…