52 citations · 293 across the 16 of their papers we have counts for
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physics.plasm-ph2020★ 25 cited
High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform
Sarveshwar Sharma, Nishant Sirse, Miles M Turner
A particle-in-cell (PIC) simulation study is performed to investigate the discharge asymmetry, higher harmonic generations and electron heating mechanism in a low pressure very hig…
physics.plasm-ph2020★ 29 cited
Driving frequency effect on discharge parameters and higher harmonic generation in capacitive discharges at constant power densities
Sarveshwar Sharma, Nishant Sirse, Animesh Kuley +2
Very high frequency (VHF) driven capacitive discharges are now being increasingly adopted for plasma-based materials processing due to their high processing rates and lower substra…