52 citations · 293 across the 16 of their papers we have counts for
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A systematic investigation of electric field nonlinearity and field reversal in low pressure capacitive discharges driven by sawtooth-like waveforms
Sarveshwar Sharma, Nishant Sirse, Miles M Turner +1
Understanding electron and ion heating phenomenon in capacitively coupled radio-frequency plasma discharges is vital for many plasma processing applications. In this article, using…
Discharge characteristics of a low-pressure geometrically asymmetric cylindrical capacitively coupled plasma with an axisymmetric magnetic field
Swati Dahiya, Pawandeep Singh, Yashashri Patil +3
We investigate the discharge characteristics of a low-pressure geometrically asymmetric cylindrical capacitively coupled plasma discharge with an axisymmetric magnetic field genera…
Flux and energy asymmetry in a low pressure capacitively coupled plasma discharge excited by sawtooth-like waveform -- a harmonic study
Sarveshwar Sharma, Nishant Sirse, Miles M Turner
Control over plasma asymmetry in a low-pressure capacitively coupled plasma (CCP) discharges is vital for many plasma processing applications. In this article, using the particle-i…