52 citations · 373 across the 22 of their papers we have counts for
22 papers
Simulation Studies of Resonant Excitation of Electron Bernstein Waves in Capacitive Discharges
Deepak Gautam, Sarveshwar Sharma, Igor Kaganovich +1
The behavior of capacitive coupled plasma (CCP) discharges is investigated in a mildly magnetized regime, defined by the condition 1 2, where …
Effect of gas pressure on plasma asymmetry and higher harmonics generation in sawtooth waveform driven capacitively coupled plasma discharge
Sarveshwar Sharma, Miles Turner, Nishant Sirse
Using particle-in-cell (PIC) simulation technique, the effect of gas pressure (5-500 mTorr) on the plasma spatial asymmetry, ionization rate, metastable gas densities profile, elec…
Experimental investigation of an electronegative cylindrical capacitively coupled geometrically asymmetric plasma discharge with an axisymmetric magnetic field
Swati Dahiya, Narayan Sharma, Shivani Geete +3
In this study, we have investigated the production of negative ions by mixing electronegative oxygen gas with electropositive argon gas in a geometrically asymmetric cylindrical ca…
Charged particle dynamics in an elliptically polarized electromagnetic wave and a uniform axial magnetic field
Shivam Kumar Mishra, Sarveshwar Sharma, Sudip Sengupta
An analytical study of the charged particle dynamics in the presence of an elliptically polarized electromagnetic wave and a uniform axial magnetic field, is presented. It is found…
A systematic investigation of electric field nonlinearity and field reversal in low pressure capacitive discharges driven by sawtooth-like waveforms
Sarveshwar Sharma, Nishant Sirse, Miles M Turner +1
Understanding electron and ion heating phenomenon in capacitively coupled radio-frequency plasma discharges is vital for many plasma processing applications. In this article, using…
Particle-in-cell simulation of a 50~mTorr capacitively coupled argon discharge over a range of frequencies
Saurabh Simha, Sarveshwar Sharma, Alexander Khrabrov +3
The effect of driving frequency in the range of 13.56 MHz to 73 MHz on electron energy distribution and electron heating modes in a 50 mTorr capacitively coupled argon plasma disch…
Direct Implicit and Explicit Energy-Conserving Particle-in-Cell Methods for Modeling of Capacitively-Coupled Plasma Devices
Haomin Sun, Soham Banerjee, Sarveshwar Sharma +5
Achieving large-scale kinetic modelling is a crucial task for the development and optimization of modern plasma devices. With the trend of decreasing pressure in applications such…
Discharge characteristics of a low-pressure geometrically asymmetric cylindrical capacitively coupled plasma with an axisymmetric magnetic field
Swati Dahiya, Pawandeep Singh, Yashashri Patil +3
We investigate the discharge characteristics of a low-pressure geometrically asymmetric cylindrical capacitively coupled plasma discharge with an axisymmetric magnetic field genera…
Flux and energy asymmetry in a low pressure capacitively coupled plasma discharge excited by sawtooth-like waveform -- a harmonic study
Sarveshwar Sharma, Nishant Sirse, Miles M Turner
Control over plasma asymmetry in a low-pressure capacitively coupled plasma (CCP) discharges is vital for many plasma processing applications. In this article, using the particle-i…
Investigating the effects of electron bounce-cyclotron resonance on plasma dynamics in capacitive discharges operated in the presence of a weak transverse magnetic field
Sarveshwar Sharma, Sanket Patil, Sudip Sengupta +3
Recently, S Patil et al. have reported the existence of an enhanced operating regime when a low-pressure (5 mTorr) capacitively coupled discharge (CCP) is driven by a very high rad…
Effect of radiation-reaction on charged particle dynamics in a focused electromagnetic wave
Shivam Kumar Mishra, Sarveshwar Sharma, Sudip Sengupta
Effect of radiation-reaction force on the dynamics of a charged particle in an intense focused light wave is investigated using the physically appealing Hartemann-Luhmann equation…
Plasma asymmetry, electron and ion energy distribution function in capacitive discharges excited by tailored waveforms
Sarveshwar Sharma, Nishant Sirse, Animesh Kuley +1
Using particle-in-cell simulation technique, we investigate the plasma and ionization asymmetry, electron and ion energy distribution function in capacitive discharges excited by t…
Ion energy distribution function in very high frequency capacitive discharges excited by sawtooth waveform
Sarveshwar Sharma, Nishant Sirse, Animesh Kuley +1
Tailoring ion energy distribution function (IEDF) is vital for advanced plasma processing applications. Capacitively coupled plasma (CCP) discharges excited using non-sinusoidal wa…
Dynamic Mode Decomposition of inertial particle caustics in Taylor-Green flow
Omstavan Samant, Jaya Kumar Alageshan, Sarveshwar Sharma +1
Inertial particles advected by a background flow can show complex structures. We consider inertial particles in a 2D Taylor-Green (TG) flow and characterize particle dynamics as a…
An enhanced operating regime for high frequency capacitive discharges
Sanket Patil, Sarveshwar Sharma, Sudip Sengupta +2
We report the existence of an enhanced operating regime for a high-frequency, low-pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic field appl…
High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform
Sarveshwar Sharma, Nishant Sirse, Miles M Turner
A particle-in-cell (PIC) simulation study is performed to investigate the discharge asymmetry, higher harmonic generations and electron heating mechanism in a low pressure very hig…
Driving frequency effect on discharge parameters and higher harmonic generation in capacitive discharges at constant power densities
Sarveshwar Sharma, Nishant Sirse, Animesh Kuley +2
Very high frequency (VHF) driven capacitive discharges are now being increasingly adopted for plasma-based materials processing due to their high processing rates and lower substra…
Electric field non-linearity in very high frequency capacitive discharges at constant electron plasma frequency
Sarveshwar Sharma, Nishant Sirse, Animesh Kuley +1
A self-consistent particle-in-cell simulation study is performed to investigate the effect of driving frequency on the electric field non-linearity, electron heating mechanism and…
Electric field filamentation and higher harmonic generation in a very high frequency capacitive discharges
Sarveshwar Sharma, N. Sirse, A. Sen +2
The effects of the discharge voltage on the formation and nature of electric field transients in a symmetric, collisionless, very high frequency, capacitively coupled plasma are st…
Plasma density and ion energy control via driving frequency and applied voltage in a low pressure capacitively coupled plasma discharge
Sarveshwar Sharma, Abhijit Sen, N. Sirse +2
The dynamical characteristics of a single frequency low pressure capacitively coupled plasma (CCP) device under varying applied RF voltages and driving frequencies are studied usin…
Influence of driving frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge
S. Sharma, N. Sirse, M. M. Turner +1
One-dimensional particle-in-cell simulation is used to simulate the capacitively coupled argon plasma for a range of driving frequency from 13.56 MHz to 100 MHz. The argon chemistr…
Spatial symmetry breaking in single-frequency CCP discharge with transverse magnetic field
Sarveshwar Sharma, Igor Kaganovich, Alexander Khrabrov +2
An independent control of the flux and energy of ions impacting on an object immersed in a plasma is often desirable for many industrial processes such as microelectronics manufact…