activity
20172025
most citedInfluence of driving frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge

52 citations · 373 across the 22 of their papers we have counts for

collaborators
Showing 2023Show all

6 papers · 1 filter

physics.plasm-ph2023

Charged particle dynamics in an elliptically polarized electromagnetic wave and a uniform axial magnetic field

Shivam Kumar Mishra, Sarveshwar Sharma, Sudip Sengupta

An analytical study of the charged particle dynamics in the presence of an elliptically polarized electromagnetic wave and a uniform axial magnetic field, is presented. It is found…

physics.plasm-ph2023

A systematic investigation of electric field nonlinearity and field reversal in low pressure capacitive discharges driven by sawtooth-like waveforms

Sarveshwar Sharma, Nishant Sirse, Miles M Turner +1

Understanding electron and ion heating phenomenon in capacitively coupled radio-frequency plasma discharges is vital for many plasma processing applications. In this article, using…

physics.plasm-ph2023

Particle-in-cell simulation of a 50~mTorr capacitively coupled argon discharge over a range of frequencies

Saurabh Simha, Sarveshwar Sharma, Alexander Khrabrov +3

The effect of driving frequency in the range of 13.56 MHz to 73 MHz on electron energy distribution and electron heating modes in a 50 mTorr capacitively coupled argon plasma disch…

physics.plasm-ph2023★ 1 cited

Direct Implicit and Explicit Energy-Conserving Particle-in-Cell Methods for Modeling of Capacitively-Coupled Plasma Devices

Haomin Sun, Soham Banerjee, Sarveshwar Sharma +5

Achieving large-scale kinetic modelling is a crucial task for the development and optimization of modern plasma devices. With the trend of decreasing pressure in applications such…

physics.plasm-ph2023★ 9 cited

Discharge characteristics of a low-pressure geometrically asymmetric cylindrical capacitively coupled plasma with an axisymmetric magnetic field

Swati Dahiya, Pawandeep Singh, Yashashri Patil +3

We investigate the discharge characteristics of a low-pressure geometrically asymmetric cylindrical capacitively coupled plasma discharge with an axisymmetric magnetic field genera…

physics.plasm-ph2023★ 11 cited

Flux and energy asymmetry in a low pressure capacitively coupled plasma discharge excited by sawtooth-like waveform -- a harmonic study

Sarveshwar Sharma, Nishant Sirse, Miles M Turner

Control over plasma asymmetry in a low-pressure capacitively coupled plasma (CCP) discharges is vital for many plasma processing applications. In this article, using the particle-i…