activity
20172025
most citedInfluence of driving frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge

52 citations · 373 across the 22 of their papers we have counts for

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Showing 2022Show all

1 paper · 1 filter

physics.plasm-ph2022★ 29 cited

Investigating the effects of electron bounce-cyclotron resonance on plasma dynamics in capacitive discharges operated in the presence of a weak transverse magnetic field

Sarveshwar Sharma, Sanket Patil, Sudip Sengupta +3

Recently, S Patil et al. have reported the existence of an enhanced operating regime when a low-pressure (5 mTorr) capacitively coupled discharge (CCP) is driven by a very high rad…