Simulation Studies of Resonant Excitation of Electron Bernstein Waves in Capacitive Discharges

Deepak Gautam, Sarveshwar Sharma, Igor Kaganovich +1

The behavior of capacitive coupled plasma (CCP) discharges is investigated in a mildly magnetized regime, defined by the condition 1 $\le$ $f_{ce}/f_{rf}$ $<$ 2, where $f_{ce}$…