38 citations · 43 across the 4 of their papers we have counts for
12 papers · 1 filter
Simulation Studies of Resonant Excitation of Electron Bernstein Waves in Capacitive Discharges
Deepak Gautam, Sarveshwar Sharma, Igor Kaganovich +1
The behavior of capacitive coupled plasma (CCP) discharges is investigated in a mildly magnetized regime, defined by the condition 1 2, where …
Effect of gas pressure on plasma asymmetry and higher harmonics generation in sawtooth waveform driven capacitively coupled plasma discharge
Sarveshwar Sharma, Miles Turner, Nishant Sirse
Using particle-in-cell (PIC) simulation technique, the effect of gas pressure (5-500 mTorr) on the plasma spatial asymmetry, ionization rate, metastable gas densities profile, elec…
Experimental investigation of an electronegative cylindrical capacitively coupled geometrically asymmetric plasma discharge with an axisymmetric magnetic field
Swati Dahiya, Narayan Sharma, Shivani Geete +3
In this study, we have investigated the production of negative ions by mixing electronegative oxygen gas with electropositive argon gas in a geometrically asymmetric cylindrical ca…
Charged particle dynamics in an elliptically polarized electromagnetic wave and a uniform axial magnetic field
Shivam Kumar Mishra, Sarveshwar Sharma, Sudip Sengupta
An analytical study of the charged particle dynamics in the presence of an elliptically polarized electromagnetic wave and a uniform axial magnetic field, is presented. It is found…
A systematic investigation of electric field nonlinearity and field reversal in low pressure capacitive discharges driven by sawtooth-like waveforms
Sarveshwar Sharma, Nishant Sirse, Miles M Turner +1
Understanding electron and ion heating phenomenon in capacitively coupled radio-frequency plasma discharges is vital for many plasma processing applications. In this article, using…
An enhanced operating regime for high frequency capacitive discharges
Sanket Patil, Sarveshwar Sharma, Sudip Sengupta +2
We report the existence of an enhanced operating regime for a high-frequency, low-pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic field appl…