paper

A CMOS Compatible Aluminum Scandium Nitride-based Ferroelectric Tunnel Junction Memristor

arXiv:2012.10019

Abstract

We report a complementary metal oxide semiconductor (CMOS) technology compatible ferroelectric tunnel junction memristor grown directly on top of a Silicon substrate using a scandium doped aluminum nitride as the ferroelectric layer.

A CMOS Compatible Aluminum Scandium Nitride-based Ferroelectric Tunnel Junction Memristor · wovepaper