Monolithically Integrated Perovskite Semiconductor Lasers on Silicon Photonic Chips by Scalable Top-Down Fabrication

Abstract

Metal-halide perovskites are promising lasing materials for realization of monolithically integrated laser sources, the key components of silicon photonic integrated circuits (PICs). Perovskites can be deposited from solution and require only low temperature processing leading to significant cost reduction and enabling new PIC architectures compared to state-of-the-art lasers realized through costly and inefficient hybrid integration of III-V semiconductors. Until now however, due to the chemical sensitivity of perovskites, no microfabrication process based on optical lithography and therefore on existing semiconductor manufacturing infrastructure has been established. Here, the first methylammonium lead iodide perovskite micro-disc lasers monolithically integrated into silicon nitride PICs by such a top-down process is presented. The lasers show a record low lasing threshold of 4.7 $\mu$Jcm${}^{-2}$ at room temperature for monolithically integrated lasers, which are CMOS compatible and can be integrated in the back-end-of-line (BEOL) processes.

References in corpus (4)

• Ambipolar Solution-processed Hybrid Perovskite Phototransistors
• Temperature Dependence of the Energy Levels of Methylammonium Lead Iodide Perovskite from First Principles
• On-Chip Integrated Quantum-Dot Silicon-Nitride Microdisk Lasers
• Integrated perovskite lasers on silicon nitride waveguide platform by cost-effective high throughput fabrication

Cited by in corpus (7)

• Metamaterial enhancement of metal-halide perovskite luminescence
• Lasing in ${\mathrm{Si}}_3{\mathrm{N}}_4$-organic hybrid (SiNOH) waveguides
• Coherent Hopping Transport and Giant Negative Magnetoresistance in Epitaxial CsSnBr${}_3$
• Spectroscopic ellipsometry of CsPbCl${}_3$ perovskite thin films
• Integrated, ultrafast all-optical polariton transistors with sub-wavelength grating microcavities
• Versatile Top-Down Patterning Technique for Perovskite On-Chip Integration
• MaPBI3 and 2D hybrid organic inorganic perovskite based microcavities employing periodic, aperiodic and disordered photonic structures and with the possibility of light-induced tuning