Regaining a spatial dimension: Mechanically transferrable two-dimensional InAs nanofins grown by selective area epitaxy

Abstract

We report a method for growing rectangular InAs nanofins with deterministic length, width and height by dielectric-templated selective-area epitaxy. These freestanding nanofins can be transferred to lay flat on a separate substrate for device fabrication. A key goal was to regain a spatial dimension for device design compared to nanowires, whilst retaining the benefits of bottom-up epitaxial growth. The transferred nanofins were made into devices featuring multiple contacts for Hall effect and four-terminal resistance studies, as well as a global back-gate and nanoscale local top-gates for density control. Hall studies give a 3D electron density $2.5-5\times 10^{17}$ cm${}^{-3}$, corresponding to an approximate surface accumulation layer density $3-6\times 10^{12}$ cm${}^{-2}$ that agrees well with previous studies of InAs nanowires. We obtain Hall mobilities as high as $1200$ cm${}^2$/Vs, field-effect mobilities as high as $4400$ cm${}^2$/Vs and clear quantum interference structure at temperatures as high as $20$ K. Our devices show excellent prospects for fabrication into more complicated devices featuring multiple ohmic contacts, local gates and possibly other functional elements, e.g., patterned superconductor contacts, that may make them attractive options for future quantum information applications.

36 pages, 5 figures, in press for Nano Letters

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• Impact of invasive metal probes on Hall measurements in semiconductor nanostructures
• Measurements of spin-orbit interaction in epitaxially grown InAs nanosheets
• Post-growth shaping and transport anisotropy in 2D InAs nanofins