Integrated optomechanical arrays of two high reflectivity SiN membranes

Abstract

Multi-element cavity optomechanics constitutes a direction to observe novel effects with mechanical resonators. Several exciting ideas include superradiance, increased optomechanical coupling, and quantum effects between distinct mechanical modes among others. Realizing these experiments has so far been difficult, because of the need for extremely precise positioning of the elements relative to one another due to the high-reflectivity required for each element. Here we overcome this challenge and present the fabrication of monolithic arrays of two highly reflective mechanical resonators in a single chip. We characterize the optical spectra and losses of these 200 $\mu$m-long Fabry-Pérot interferometers, measuring finesse values of up to 220. In addition, we observe an enhancement of the coupling rate between the cavity field and the mechanical center-of-mass mode compared to the single membrane case. Further enhancements in coupling with these devices are predicted, potentially reaching the single-photon strong coupling regime, giving these integrated structures an exciting prospect for future multi-mode quantum experiments.

References in corpus (22)

• Cavity Optomechanics
• Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
• Topological energy transfer in an optomechanical system with exceptional points
• Remote quantum entanglement between two micromechanical oscillators
• Strong and Tunable Nonlinear Optomechanical Coupling in a Low-Loss System
• Synchronization of Micromechanical Oscillators Using Light
• Mechanical Resonators for Quantum Optomechanics Experiments at Room Temperature
• Steady state entanglement in the mechanical vibrations of two dielectric membranes
• Hanbury Brown and Twiss interferometry of single phonons from an optomechanical resonator
• Strong coupling and long-range collective interactions in optomechanical arrays
• Ultralow-Noise SiN Trampoline Resonators for Sensing and Optomechanics
• Nonlinear cavity optomechanics with nanomechanical thermal fluctuations
• Optomechanical circuits for nanomechanical continuous variable quantum state processing
• Multiple membrane cavity optomechanics
• Two-membrane cavity optomechanics
• High-finesse Fabry-Perot cavities with bidimensional Si${}_3$N${}_4$ photonic-crystal slabs
• Coherent Optomechanical State Transfer between Disparate Mechanical Resonators
• Superradiance and collective gain in multimode optomechanics
• Cavity Mode Frequencies and Strong Optomechanical Coupling in Two-Membrane Cavity Optomechanics
• From membrane-in-the-middle to mirror-in-the-middle with a high-reflectivity sub-wavelength grating
• Optomechanical characterization of silicon nitride membrane arrays
• Dynamical scattering models in optomechanics: Going beyond the 'coupled cavities' model

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• Cavity Quantum Electrodynamics with Frequency-Dependent Reflectors
• Two-membrane cavity optomechanics: non-linear dynamics
• Cavity Optomechanics with Photonic Bound States in the Continuum
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• Direct laser-written optomechanical membranes in fiber Fabry-Perot cavities
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• High-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics
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• Optomechanical cooling with coherent and squeezed light: the thermodynamic cost of opening the heat valve
• Squeeze film pressure sensors based on SiN membrane sandwiches
• Integrated microcavity optomechanics with a suspended photonic crystal mirror above a distributed Bragg reflector
• Preparation and Verification of Two-Mode Mechanical Entanglement Through Pulsed Optomechanical Measurements
• Suspended silicon nitride thin films with enhanced and electrically tunable reflectivity
• Optimal Optomechanical Coupling Strength in Multi-Membrane Systems
• Nanomechanical crystalline AlN resonators with high quality factors for quantum optoelectromechanics
• Thermally induced entanglement of atomic oscillators
• Nanomechanical Design Strategy for Single-Mode Optomechanical Measurement
• Quasibound states in the continuum in photonic-crystal-based optomechanical microcavities
• Broadband, High-Reflectivity Dielectric Mirrors at Wafer Scale: Combining Photonic Crystal and Metasurface Architectures for Advanced Lightsails
• Stress-controlled frequency tuning and parametric amplification of the vibrations of coupled nanomembranes
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• Profilometry and stress analysis of suspended nanostructured thin films
• Stress-Dependent Optical Extinction in LPCVD Silicon Nitride Measured by Nanomechanical Photothermal Sensing
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• Generation of stable Gaussian cluster states in optomechanical systems with multifrequency drives
• Mechanical investigations of free-standing SiN membranes patterned with one-dimensional photonic crystal structures
• Two-membrane etalon
• Polarization-independent optical spatial differentiation with a doubly-resonant one-dimensional guided-mode grating
• Highly reflective and high-$Q$ thin resonant subwavelength gratings
• Mechanical characterization of a membrane with an on-chip loss shield in a cryogenic environment
• Atom-Mechanical Hong-Ou-Mandel Interference
• Collimation and finite-size effects in suspended resonant guided-mode gratings
• Mechanical dissipation by substrate-mode coupling in SiN resonators
• Optical microcavity with a pair of suspended resonant mirrors