Nano-Opto-Electro-Mechanical Systems

Abstract

A new class of hybrid systems that couple optical, electrical and mechanical degrees of freedom in nanoscale devices is under development in laboratories worldwide. These nano-opto-electro-mechanical systems (NOEMS) offer unprecedented opportunities to dynamically control the flow of light in nanophotonic structures, at high speed and low power consumption. Drawing on conceptual and technological advances from cavity optomechanics, they also bear the potential for highly efficient, low-noise transducers between microwave and optical signals, both in the classical and quantum domains. This Progress Article discusses the fundamental physical limits of NOEMS, reviews the recent progress in their implementation, and suggests potential avenues for further developments in this field.

27 pages, 3 figures, 2 boxes

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Cited by in corpus (60)

• Efficient bidirectional piezo-optomechanical transduction between microwave and optical frequency
• Single-photon quantum hardware: towards scalable photonic quantum technology with a quantum advantage
• Controlling phonons and photons at the wavelength-scale: silicon photonics meets silicon phononics
• MEMS for Photonic Integrated Circuits
• Optomechanically Induced Transparency at Exceptional Points
• Nanometer-scale photon confinement in topology-optimized dielectric cavities
• Hybrid Integrated Photonics Using Bulk Acoustic Resonators
• Cavity piezo-mechanics for superconducting-nanophotonic quantum interface
• Heralded Generation and Detection of Entangled Microwave--Optical Photon Pairs
• A perspective on hybrid quantum opto- and electromechanical systems
• Microwave-to-optical transduction using a mechanical supermode for coupling piezoelectric and optomechanical resonators
• Ground State Cooling of an Ultracoherent Electromechanical System
• Loss-induced transparency in optomechanics
• Infrared nanosensors of pico- to micro-newton forces
• Nanomechanical single-photon routing
• Optomechanics with one-dimensional gallium phosphide photonic crystal cavities
• Figures of merit for quantum transducers
• Radiative cooling of a superconducting resonator
• Microwave--Optical entanglement in a Strongly Coupled Electro-Optomechanical System
• Piezoelectric actuation for integrated photonics
• Cavity Quantum Electrodynamics with Frequency-Dependent Reflectors
• Nano-structured alkali-metal vapor cells
• Dynamically-enhanced strain in atomically thin resonators
• Centimeter-scale nanomechanical resonators with low dissipation
• Suspended photonic crystal membranes in AlGaAs heterostructures for integrated multi-element optomechanics
• Soft-clamped phononic dimers for mechanical sensing and transduction
• Modelling and observation of nonlinear damping in dissipation-diluted nanomechanical resonators
• Generation of a single-cycle acoustic pulse: a scalable solution for transport in single-electron circuits
• High-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics
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• Enhancement of Opto-Electro-Mechanical Entanglement through Three-Level Atoms
• A frequency-tunable nanomembrane mechanical oscillator with embedded quantum dots
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• Electromechanics in vertically coupled nanomembranes
• Profilometry and stress analysis of suspended nanostructured thin films
• Stress-controlled frequency tuning and parametric amplification of the vibrations of coupled nanomembranes
• Quantum Nondemolition Photon Counting With a Hybrid Electromechanical Probe
• Fabry-Perot Interferometric Calibration of 2D Nanomechanical Plate Resonators
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• Quantum manipulation of a two-level mechanical system
• Edge mode engineering for optimal ultracoherent silicon nitride membranes
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• Shaping Quantum Photonic States Using Free Electrons
• Strain-induced exciton decomposition and anisotropic lifetime modulation in a GaAs micromechanical resonator
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• Quantum evolution of mixed states and performance of quantum heat engines
• Hyperspectral Nanomotion Microscopy