Electromechanical tuning of vertically-coupled photonic crystal nanobeams

Abstract

We present the design, the fabrication and the characterization of a tunable one-dimensional (1D) photonic crystal cavity (PCC) etched on two vertically-coupled GaAs nanobeams. A novel fabrication method which prevents their adhesion under capillary forces is introduced. We discuss a design to increase the flexibility of the structure and we demonstrate a large reversible and controllable electromechanical wavelength tuning (> 15 nm) of the cavity modes.

arXiv comment11 pages, 4 figures

References in corpus (4)

• High Quality factor photonic crystal nanobeam cavities
• A chip-scale integrated cavity-electro-optomechanics platform
• Electrostatically tunable optomechanical "zipper" cavity laser
• Electromechanical wavelength tuning of double-membrane photonic crystal cavities

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