Fabrication of Ultrathin Single-Crystal Diamond Membranes
arXiv:1608.08914 · doi:10.1002/adma.200801460
Abstract
We demonstrate the fabrication of sub-micron layers of single-crystal diamond suitable for subsequent processing as demonstrated by this test ring structure. This method is a significant enabling technology for nanomechanical and photonic structures incorporating colour-centres. The process uses a novel double implant process, annealing and chemical etching to produce membranes of diamond from single-crystal starting material, the thinnest layers achieved to date are 210 nm thick.
21 pages, 4 figures
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- Single photon quantum non-demolition in the presence of inhomogeneous broadening
- Characterization of the recovery of mechanical properties of ion-implanted diamond after thermal annealing
- An analytical model for the mechanical deformation of locally graphitized diamond
- Micro-beam and pulsed laser beam techniques for the micro-fabrication of diamond surface and bulk structures
- Processing of Photonic Crystal Nanocavity for Quantum Information in Diamond