155 citations · 213 across the 3 of their papers we have counts for
3 papers
cond-mat.mtrl-sci2016★ 155 cited
Fabrication of Ultrathin Single-Crystal Diamond Membranes
B. A. Fairchild, P. Olivero, S. Rubanov +9
We demonstrate the fabrication of sub-micron layers of single-crystal diamond suitable for subsequent processing as demonstrated by this test ring structure. This method is a signi…
cond-mat.mtrl-sci2016★ 33 cited
An upper limit on the lateral vacancy diffusion length in diamond
J. O. Orwa, K. Ganesan, J. Newnham +9
Ion implantation is widely used to modify the structural, electrical and optical properties of materials. By appropriate masking, this technique can be used to define nano- and mic…
cond-mat.mtrl-sci2016★ 25 cited
Structural transformation of implanted diamond layers during high temperature annealing
S. Rubanov, B. A. Fairchild, A. Suvorova +2
In the recent years graphitization of ion-beam induced amorphous layers became the basic tool for device fabrication in diamond. The etchable graphitic layers can be removed to for…