Direct measurement and modelling of internal strains in ion-implanted diamond

Abstract

We present a phenomenological model and Finite Element simulations to describe the depth variation of mass density and strain of ion-implanted single-crystal diamond. Several experiments are employed to validate the approach: firstly, samples implanted with 180 keV B ions at relatively low fluences are characterized using high-resolution X-ray diffraction (HR-XRD); secondly, the mass density variation of a sample implanted with 500 keV He ions well above its amorphization threshold is characterized with Electron Energy Loss Spectroscopy (EELS). At high damage densities, the experimental depth profiles of strain and density display a saturation effect with increasing damage and a shift of the damage density peak towards greater depth values with respect to those predicted by TRIM simulations, which are well accounted for in the model presented here. The model is then further validated by comparing TEM-measured and simulated thickness values of a buried amorphous carbon layer formed at different depths by implantation of 500 keV He ions through a variable-thickness mask to simulate the simultaneous implantation of ions at different energies.

40 pages, 9 figures, submitted to Physical Review B

References in corpus (9)

• Fabrication of Ultrathin Single-Crystal Diamond Membranes
• Characterization of Three-Dimensional Microstructures in Single Crystal Diamond
• Fabrication and electrical characterization of three-dimensional graphitic microchannels in single crystal diamond
• Evidence of light guiding in ion-implanted diamond
• Finite element analysis of ion-implanted diamond surface swelling
• A new diamond biosensor with integrated graphitic microchannels for detecting quantal exocytic events from chromaffin cells
• Modification of the structure of diamond with MeV ion implantation
• Focused ion beam fabrication and IBIC characterization of a diamond detector with buried electrodes
• Spectroscopic measurement of the refractive index of ion-implanted diamond

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• Mapping the local spatial charge in defective diamond by means of NV sensors - A "self-diagnostic" concept
• Effects of high-power laser irradiation on sub-superficial graphitic layers in single crystal diamond
• Micro and nano-patterning of single-crystal diamond by swift heavy ion irradiation
• An analytical model for the mechanical deformation of locally graphitized diamond
• Kelvin probe characterization of buried graphitic microchannels in single-crystal diamond