most citedAn Active Chaotic Micromixer Integrating Thermal Actuation Associating PDMS and Silicon Microtechnology

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cs.OH20081 cited

A Novel Piezoelectric Microtransformer for Autonmous Sensors Applications

Patrick Sangouard, G. Lissorgues, T. Bourouina

This work relates to a novel piezoelectric transformer to be used in an autonomous sensor unit, possibly in conjunction with a RF-MEMS retro-modulator.

cs.OH20083 cited

Optimization and AMS Modeling for Design of an Electrostatic Vibration Energy Harvester's Conditioning Circuit with an Auto-Adaptive Process to the External Vibration Changes

Dimitri Galayko, Philippe Basset, Ayyaz Mahmood Paracha

Electrostatic transducers for vibration energy scavenging have been an object to numerous studies, but are still facing major issues relating to their conditioning circuit. One of…

cs.OH20086 cited

A High Power Density Electrostatic Vibration-to-Electric Energy Converter Based On An In-Plane Overlap Plate (IPOP) Mechanism

A. M. Paracha, Ph. Basset, F. Marty +3

In this paper, design, fabrication and characterization issues of a bulk silicon-based, vibration powered, electric energy generator are addressed. The converter is based on an In-…

cs.OH20076 cited

An Active Chaotic Micromixer Integrating Thermal Actuation Associating PDMS and Silicon Microtechnology

O. Français, M. -C. Jullien, L. Rousseau +5

Due to scaling laws, in microfluidic, flows are laminar. Consequently, mixing between two liquids is mainly obtained by natural diffusion which may take a long time or equivalently…

cs.OH2007

Electrostatically-Driven Resonator on Soi with Improved Temperature Stability

A. Giridhar, F. Verjus, F. Marty +2

This paper deals with a single-crystal-silicon (SCS) MEMS resonator with improved temperature stability. While simulations have shown that the temperature coefficient of resonant f…

cs.OH2007

Surface Conditioning Effect on Vacuum Microelectronics Components Fabricated by Deep Reactive Ion Etching

A. Phommahaxay, G. Lissorgues, L. Rousseau +2

Advances in material processing such as silicon micromachining are opening the way to vacuum microelectronics. Two-dimensional vacuum components can be fabricated using the microsy…