6 citations
- Laboratoire d'électronique, systèmes de communication et microsystèmesFR2 papers
- ESI Group (Switzerland)CH1 paper
- Institute of Ethnology and Folklore ResearchHR1 paper
- Laboratoire de Photophysique et Photochimie Supramoléculaires et MacromoléculairesFR1 paper
- Laboratoire des systèmes et applications des technologies de l'information et de l'énergieFR1 paper
- Thales (Australia)AU1 paper
4 papers
A High Power Density Electrostatic Vibration-to-Electric Energy Converter Based On An In-Plane Overlap Plate (IPOP) Mechanism
A. M. Paracha, Ph. Basset, F. Marty +3
In this paper, design, fabrication and characterization issues of a bulk silicon-based, vibration powered, electric energy generator are addressed. The converter is based on an In-…
An Active Chaotic Micromixer Integrating Thermal Actuation Associating PDMS and Silicon Microtechnology
O. Français, M. -C. Jullien, L. Rousseau +5
Due to scaling laws, in microfluidic, flows are laminar. Consequently, mixing between two liquids is mainly obtained by natural diffusion which may take a long time or equivalently…
Electrostatically-Driven Resonator on Soi with Improved Temperature Stability
A. Giridhar, F. Verjus, F. Marty +2
This paper deals with a single-crystal-silicon (SCS) MEMS resonator with improved temperature stability. While simulations have shown that the temperature coefficient of resonant f…
Surface Conditioning Effect on Vacuum Microelectronics Components Fabricated by Deep Reactive Ion Etching
A. Phommahaxay, G. Lissorgues, L. Rousseau +2
Advances in material processing such as silicon micromachining are opening the way to vacuum microelectronics. Two-dimensional vacuum components can be fabricated using the microsy…