6 citations · 6 across the 2 of their papers we have counts for
2 papers
cs.OH2008★ 6 cited
A High Power Density Electrostatic Vibration-to-Electric Energy Converter Based On An In-Plane Overlap Plate (IPOP) Mechanism
A. M. Paracha, Ph. Basset, F. Marty +3
In this paper, design, fabrication and characterization issues of a bulk silicon-based, vibration powered, electric energy generator are addressed. The converter is based on an In-…
cs.OH2007
Electrostatically-Driven Resonator on Soi with Improved Temperature Stability
A. Giridhar, F. Verjus, F. Marty +2
This paper deals with a single-crystal-silicon (SCS) MEMS resonator with improved temperature stability. While simulations have shown that the temperature coefficient of resonant f…