Contact resistances in trigate and FinFET devices in a Non-Equilibrium Green's Functions approach

Léo Bourdet, Johan Pelloux-Prayer, François Triozon +5

We compute the contact resistances $R_{\mathrm{c}}$ in trigate and FinFET devices with widths and heights in the 4 to 24 nm range using a Non-Equilibrium Green's Functions approach. Ele…