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physics.app-ph2025
High-Purity Diamond Integration on -GaO via Microwave Plasma CVD for Enhanced Thermal Management
Saleh Ahmed Khan, Stephen Margiotta, Ahmed Ibreljic +1
The integration of diamond with -GaO presents a promising pathway to enhance thermal management in high-power electronic devices, where the inherently low thermal conduc…
physics.app-ph2025★ 9 cited
LPCVD based Plasma Damage Free in situ etching of -GaO using Solid Source Gallium
Saleh Ahmed Khan, Ahmed Ibreljic, A F M Anhar Uddin Bhuiyan
This work demonstrates a novel in situ etching technique for -GaO using solid-source metallic Ga in a LPCVD system, enabling clean, anisotropic, plasma damage-free etchi…