29 citations · 90 across the 19 of their papers we have counts for
20 papers
Collisionless Bulk Electron Heating in Resonant Low-Voltage Capacitively Coupled Plasmas
Sarveshwar Sharma, Igor D. Kaganovich, Animesh Kuley +3
We investigate collisionless power absorption in resonant, lowpressure capacitively coupled plasmas (CCPs). In these radio-frequency (RF) discharges, the sheath capacitance almo…
Inductively Coupled Plasma Driven by Asymmetric Triangular Current Waveform
Shahid Rauf, Tianhong Wang, Jason Kenney +2
Two-dimensional particle-in-cell simulations of an inductively coupled plasma (ICP) are used to investigate the influence of radio-frequency (RF) current waveform and frequency on…
Ion-neutral and neutral-neutral scattering in argon at KeV energies and implications for high-aspect-ratio etching
Alexander V. Khrabrov, Igor D. Kaganovich
In this study, we report a physical model and a Monte Carlo simulation scheme developed to predict the angular distributions of energetic argon atoms and ions as an ion beam passes…
Laser ion acceleration from concave targets by subpicosecond pulses
K. V. Lezhnin, V. Ospina-Bohórquez, J. Griff-McMahon +6
Laser-driven proton acceleration provides a powerful route for generating ultrashort, high-charge proton beams. Many applications, including secondary neutron sources and inertial…
Partially Ionized Plasma Physics and Technological Applications
Igor Kaganovich, Michael Tendler
Partially ionized plasma physics has attracted a lot of attention recently due to numerous technological applications made possible by the increased sophistication of computer mode…
Transition Metal Dichalcogenide MoS: oxygen and fluorine functionalization for selective plasma processing
Yury Polyachenko, Yuri Barsukov, Shoaib Khalid +1
Low-temperature plasma processing is a promising technique for tailoring transition metal dichalcogenides (TMDs). For chalcogen substitution processing, a key challenge is to ident…
Particle-In-Cell Informed Kinetic Modeling of Nonlinear Skin Effects in Low-Frequency Inductively Coupled Plasmas
Haomin Sun, Jian Chen, Alexander Khrabrov +4
We perform extensive 2D Particle-In-Cell (PIC) electromagnetic simulations of low pressure Inductively Coupled Plasma (ICP) discharges with various coil current and driving frequen…
Resonantly Driven Electron Bernstein Waves in Magnetized Low-Pressure Capacitive Discharges
Deepak Gautam, Sarveshwar Sharma, Igor Kaganovich +1
The physics of capacitively coupled plasma (CCP) discharges is investigated in a mildly magnetized regime, defined by , where and denote…
Simulation Studies of Resonant Excitation of Electron Bernstein Waves in Capacitive Discharges
Deepak Gautam, Sarveshwar Sharma, Igor Kaganovich +1
The behavior of capacitive coupled plasma (CCP) discharges is investigated in a mildly magnetized regime, defined by the condition 1 2, where …
Sheath electron heating in surface wave discharges driven at microwave frequencies
Denis Eremin, Andrew T. Powis, Igor D. Kaganovich
Using fully electromagnetic particle-in-cell/Monte Carlo simulations, the electron heating due to interaction with a moving sheath is demonstrated to dominate in surface wave-drive…
Nonlinear skin effect regime when a radio frequency electromagnetic field penetrates into a background plasma
Haomin Sun, Jian Chen, Alexander Khrabrov +4
Two-dimensional, electromagnetic particle-in-cell simulations are employed to study particle kinetics and power deposition in the skin layer when a Radio Frequency (RF) electromagn…
Three-dimensional Helical-rotating Plasma Structures in Beam-generated Partially Magnetized Plasmas
Jian Chen, Andrew T. Powis, Igor D. Kaganovich +1
Azimuthal structures emerging in beam-generated partially magnetized plasmas are investigated using three-dimensional particle-in-cell/Monte Carlo collision simulations. Two distin…
Rarefied xenon flow in orificed hollow cathodes
Pierre-Yves C. R. Taunay, Willca Villafana, Sangeeta P. Vinoth +2
A parametric study is conducted to quantify the effect of the keeper electrode geometry on the neutral flow quantities within orificed hollow cathodes, prior to cathode ignition. T…
Improved algorithm for a two-dimensional Darwin particle-in-cell code
Dmytro Sydorenko, Igor D. Kaganovich, Alexander V. Khrabrov +3
A two-dimensional particle-in-cell code for simulation of low-frequency electromagnetic processes in laboratory plasmas has been developed. The code uses the Darwin method omitting…
Investigating Instabilities in Magnetized Low-pressure Capacitively-Coupled RF Plasma using Particle-in-Cell (PIC) Simulations
Sathya Ganta, Kallol Bera, Shahid Rauf +5
The effect of a uniform magnetic field on particle transport in low-pressure radio frequency (RF) capacitively coupled plasma (CCP) has been studied using a particle-in-cell (PIC)…
Establishing Criteria for the Transition from Kinetic to Fluid Modeling in Hollow Cathode Analysis
Willca Villafana, Andrew T. Powis, Sarveshwar Sharma +2
In this study, we conduct 2D3V Particle-In-Cell simulations of hollow cathodes, encompassing both the channel and plume region, with an emphasis on plasma switch applications. The…
Study of Synchronous RF Pulsing in Dual Frequency Capacitively Coupled Plasma
Abhishek Verma, Shahid Rauf, Kallol Bera +3
Low-pressure multi-frequency capacitively coupled plasmas are used for numerous etch and deposition applications in the semiconductor industry. Pulsing of the radio-frequency (RF)…
Particle-in-cell modeling of electron beam generated plasma
Shahid Rauf, D. Sydorenko, S. Jubin +4
Plasmas generated using energetic electron beams are well known for their low electron temperature () and plasma potential, which makes them attractive for atomic-precision…
Effect of collisions on the two-stream instability in a finite length plasm
Dmytro Sydorenko, Igor D. Kaganovich, Peter L. G. Vetzek
The instability of a monoenergetic electron beam in a collisional one-dimensional plasma bounded between grounded walls is considered both analytically and numerically. Collisions…
Band Structure of the Growth Rate of the Two-Stream Instability of an Electron Beam Propagating in a Bounded Plasma
I. D. Kaganovich, D. Sydorenko
This paper presents a study of the two-stream instability of an electron beam propagating in a finite-size plasma placed between two electrodes. It is shown that the growth rate in…