Inductively Coupled Plasma Driven by Asymmetric Triangular Current Waveform
arXiv:2606.02736
Abstract
Two-dimensional particle-in-cell simulations of an inductively coupled plasma (ICP) are used to investigate the influence of radio-frequency (RF) current waveform and frequency on plasma characteristics, collision processes, and the electron velocity distribution function driven by asymmetric triangular waveform current.
arXiv comment28 pages, 15 Figures