29 citations · 90 across the 19 of their papers we have counts for
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physics.plasm-ph2023
Study of Synchronous RF Pulsing in Dual Frequency Capacitively Coupled Plasma
Abhishek Verma, Shahid Rauf, Kallol Bera +3
Low-pressure multi-frequency capacitively coupled plasmas are used for numerous etch and deposition applications in the semiconductor industry. Pulsing of the radio-frequency (RF)…
physics.plasm-ph2023★ 20 cited
Particle-in-cell modeling of electron beam generated plasma
Shahid Rauf, D. Sydorenko, S. Jubin +4
Plasmas generated using energetic electron beams are well known for their low electron temperature () and plasma potential, which makes them attractive for atomic-precision…