29 citations · 90 across the 19 of their papers we have counts for
6 papers · 1 filter
Collisionless Bulk Electron Heating in Resonant Low-Voltage Capacitively Coupled Plasmas
Sarveshwar Sharma, Igor D. Kaganovich, Animesh Kuley +3
We investigate collisionless power absorption in resonant, lowpressure capacitively coupled plasmas (CCPs). In these radio-frequency (RF) discharges, the sheath capacitance almo…
Inductively Coupled Plasma Driven by Asymmetric Triangular Current Waveform
Shahid Rauf, Tianhong Wang, Jason Kenney +2
Two-dimensional particle-in-cell simulations of an inductively coupled plasma (ICP) are used to investigate the influence of radio-frequency (RF) current waveform and frequency on…
Ion-neutral and neutral-neutral scattering in argon at KeV energies and implications for high-aspect-ratio etching
Alexander V. Khrabrov, Igor D. Kaganovich
In this study, we report a physical model and a Monte Carlo simulation scheme developed to predict the angular distributions of energetic argon atoms and ions as an ion beam passes…
Laser ion acceleration from concave targets by subpicosecond pulses
K. V. Lezhnin, V. Ospina-Bohórquez, J. Griff-McMahon +6
Laser-driven proton acceleration provides a powerful route for generating ultrashort, high-charge proton beams. Many applications, including secondary neutron sources and inertial…
Partially Ionized Plasma Physics and Technological Applications
Igor Kaganovich, Michael Tendler
Partially ionized plasma physics has attracted a lot of attention recently due to numerous technological applications made possible by the increased sophistication of computer mode…
Transition Metal Dichalcogenide MoS: oxygen and fluorine functionalization for selective plasma processing
Yury Polyachenko, Yuri Barsukov, Shoaib Khalid +1
Low-temperature plasma processing is a promising technique for tailoring transition metal dichalcogenides (TMDs). For chalcogen substitution processing, a key challenge is to ident…